SU-8/Definition

From Citizendium
Jump to navigation Jump to search
This article is developing and not approved.
Main Article
Discussion
Related Articles  [?]
Bibliography  [?]
External Links  [?]
Citable Version  [?]
 
A definition or brief description of SU-8.

Commonly used viscous epoxy-based negative photoresist polymer, which can be spun or spread over a thickness ranging from 1 micrometer up to 2 millimeters and still be processed with standard contact lithography.